Facility Profile

SILFEX INC
LAM RESEARCH CORP
Facility Summary
950 S FRANKLIN ST, EATON, OH, 45320 (PREBLE)
In 2022, this facility made toxic releases of:
- Concern to the air
- Onsite air release of Clean Air Act chemicals
This facility reported the following greenhouse gas releases for 2022:
18-month enforcement and compliance history summary for this facility:
Facility: No Violation Identified
Clean Air Act:
Clean Water Act:
Resource Conservation and Recovery Act : No Violation Identified
Total Penalties: $0
Last Penalty: N/A
2022 Toxic Substance Releases
Substance Total
(lbs)
Air
(lbs)
Water
(lbs)
Land
(lbs)
UnInj
(lbs)
Offsite
(lbs)
HYDROFLUORIC ACID
CASRN: 7664-39-3
2,555.00 487.00 0.00 0.00 0.00 2,068.00
Substance Total Air Water Land UnInj Offsite
NITRIC ACID
CASRN: 7697-37-2
1,290.00 1,290.00 0.00 0.00 0.00 0.00
Substance Total Air Water Land UnInj Offsite