Facility Profile

SILFEX INC
LAM RESEARCH CORP
Facility Summary
1000 TITUS RD, SPRINGFIELD, OH, 45502 (CLARK)
In 2022, this facility made toxic releases of:
- Concern to the air
- Onsite air release of Clean Air Act chemicals
This facility reported the following greenhouse gas releases for 2022:
18-month enforcement and compliance history summary for this facility:
Facility: No Violation Identified
Clean Air Act:
Clean Water Act:
Resource Conservation and Recovery Act : No Violation Identified
Total Penalties: $0
Last Penalty: N/A
2022 Toxic Substance Releases
Substance Total
(lbs)
Air
(lbs)
Water
(lbs)
Land
(lbs)
UnInj
(lbs)
Offsite
(lbs)
NITRATE COMPOUNDS (WATER DISSOCIABLE)
CASRN: N511
17,427.30 0.00 0.00 0.00 0.00 17,427.30
Substance Total Air Water Land UnInj Offsite
NITRIC ACID
CASRN: 7697-37-2
3,073.00 3,073.00 0.00 0.00 0.00 0.00
Substance Total Air Water Land UnInj Offsite
HYDROFLUORIC ACID
CASRN: 7664-39-3
172.00 172.00 0.00 0.00 0.00 0.00
Substance Total Air Water Land UnInj Offsite